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    Contour-quality assessment for OPC model calibration

    Filitchkin, Paul
    ;
    Do, Thuy
    ;
    Kusnadi, Ir
    ;
    Sturtevant, John
    ;
    De Bisschop, Peter  
    Proceedings paper
    2009, Metrology, Inspection and Process Control for Microlithography XXIII, 22/02/2009, p.72722Q

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