Browsing by Author "Finders, J."
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Publication Experimental verification of a model based decomposition method for double dipole lithography
;Eurlings, M. ;Hsu, S.D.; ;op 't Root, W. ;Laidig, T.L. ;Chiou, T.B. ;Chen, A.Chen, F.Proceedings paper2004, Optical Microlithography XVII, 22/02/2004, p.1225-1236Publication Extending EUV lithography for DRAM applications
; ;Van Lare, C. ;Oorschot, D. ;Hoefnagels, R. ;Liu, S. ;Van Mierlo, W.Zuurbier, N.Proceedings paper2020, Extreme Ultraviolet (EUV) Lithography XI, 20/02/2020, p.113230U