Browsing by Author "Fischer, D.A."
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Publication Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film
;Chang, K.S. ;Green, M.L. ;Levin, I. ;Hattrick-Simpers, J.R. ;Jaye, C. ;Fischer, D.A.Takeuchi, I.Journal article2010, Applied Physics Letters, (96) 19, p.192114