Browsing by Author "Flannery, C.M."

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Nanoporous polymer film properties from Brillouin light scattering and surface acoustic wave spectroscopy

Flannery, C.M.
;
Kim, S.
;
Wittkowski, T.
;
Jung, K.
;
Hillebrands, B.
;
Baklanov, Mikhaïl
Proceedings paper
2002, Proceedings IEEE Ultrasonics Symposium, 9/10/2002, p.211-214
Strength-porosity relationship of nanoporous MSSQ films characterized by Brillouin light scattering and surface acoustic wave spectrosopy

Flannery, C.M.
;
Wittkowski, T.
;
Jung, K.
;
Hillebrands, B.
;
Baklanov, Mikhaïl
Proceedings paper
2002, Silicon Materials - Processing, Characterization, and Reliability, 1/04/2002, p.343-354
Thin-film aerogel porosity and stiffness characterized by surface acoustic wave spectroscopy

Flannery, C.M.
;
Murray, C.
;
Baklanov, Mikhaïl
;
Streiter, I.
;
Schultz, S.E>
Proceedings paper
2002, Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II, 16/04/2001, p.L12.7