Browsing by Author "Fohn, C."
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Publication Multi-step trap-assisted tunneling in Al-doped HfO2 used in advanced 2.5D metal-insulator-metal capacitors
;Fohn, C. ;Chery, E. ;Croes, K. ;Stucchi, M.Afanas'ev, V.Journal article2025-AUG 21, JOURNAL OF APPLIED PHYSICS, (138) 7