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Browsing by Author "Fragalà, I.L."

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    MOCVD processes for electronic materials adopting Bi(C6H5)3 percursor: kinetics and mechanisms

    Bedoya, C.
    ;
    Condorelli, G.
    ;
    Anastasi, G.
    ;
    Lisoni, Judit
    ;
    Wouters, Dirk
    ;
    Fragalà, I.L.
    Proceedings paper
    2004, Integration of Advanced Micro- and Nano- Electronic Devices - Critical Issues and Solutions, 12/04/2004, p.D3.21

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