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Browsing by Author "Frangend, Andreas"

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    Publication

    Enabling Curvilinear Masks: Novel Mask Qualification Methodology and Experimental Verification

    Trivkovic, Darko  
    ;
    Jang, Il-Yong
    ;
    Meusemann, Stefan
    ;
    Wang, Xiaolong
    ;
    Shi, Xuelong  
    ;
    Meng, Renyang  
    Proceedings paper
    2025, Photomask Technology, 2025-09-22, p.136870M

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