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    High refractive index fluid evaluations at 193 nm: Fluid lifetime and fluid/resist interaction studies

    Tran, HV
    ;
    Hendrickx, Eric  
    ;
    French, RH
    ;
    Adelman, DJ
    ;
    Rogado, NS
    ;
    Kaku, M
    Journal article
    2008, Journal of Photopolymer Science and Technology, (21) 5, p.631-639

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