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Browsing by Author "Fujikawa, M."

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    Publication

    A Novel Volatile Film for Dielectric Plasma Damage Protection

    de Marneffe, Jean-Francois  
    ;
    Rezvanov, Askar
    ;
    Chanson, Romain
    ;
    Babaei Gavan, Khashayar  
    Meeting abstract
    2019, Plasma Etch and Strip in Microtechnology Workshop - PESM, 20/05/2019

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