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Browsing by Author "Görgens, L."

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    High resolution depth profiling of future gate dielectric materials

    Bergmaier, A.
    ;
    Dollinger, G.
    ;
    Görgens, L.
    ;
    Neumaier, P.
    ;
    Bender, Hugo  
    ;
    Brijs, Bert
    ;
    Conard, Thierry  
    Oral presentation
    2003, E-MRS Spring Meeting Symposium I: Functional Metal-Oxides-Semiconductor Structures

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