Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Gabriel, Leo"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Twenty heads are better than one: scalable microAFM for highthroughput metrology and inspection

    Gabriel, Leo
    ;
    Marcano, Jorge
    ;
    Herz, Erik
    ;
    Cao, Zhenle
    ;
    Wang, Qianshu
    ;
    Moussa, Alain  
    Proceedings paper
    2026, Metrology, Inspection, and Process Control XL, 2022-02-22, p.139810T

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings