Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Gadda, Thomas M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    A High-Resolution EUV Zinc-Oximate Resist: Why Post-exposure Bake Fails to Improve Lithography Performance

    Chen, Ying-Lin  
    ;
    Holzmeier, Fabian  
    ;
    Fallica, Roberto  
    ;
    Nathanael, Tan Manuel Marcello
    Journal article
    2026, JOURNAL OF PHYSICAL CHEMISTRY C, (130) 19, p.6795-6807

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings