Browsing by Author "Gage, David M."

Now showing 1 - 2 of 2

Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films

Iacopi, Francesca
;
Waldfried, Carlo
;
Abell, Thomas
;
Guyer, Eric
;
Eyckens, Brenda
Oral presentation
2005, MRS Spring Meeting Symposium B: Materials, Technology and Reliability of Advanced Interconnects
Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure

Iacopi, Francesca
;
Beyer, Gerald
;
Travaly, Youssef
;
Waldfried, Carlo
;
Gage, David M.
Journal article
2007-02, Acta Materialia, (55) 4, p.1407-1414