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Browsing by Author "Gajula, D.R."

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    Atom probe tomography for 3D-dopant analysis in FinFET devices

    Kambham, Ajay Kumar
    ;
    Zschaetzsch, Gerd
    ;
    Sasaki, Yuichiro
    ;
    Togo, Mitsuhiro
    ;
    Horiguchi, Naoto  
    Proceedings paper
    2012, Symposium on VLSI Technology - VLSIT, 12/06/2012, p.77-78

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