Browsing by Author "Galiullin, Airat"
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Publication At-resolution stitching with high-reflectivity low-n masks
Journal article2025, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (24) 4, p.041204Publication Methodology of Stitching Evaluation at NA 0.33 to enable high-NA assessment
Proceedings paper2025, 40th European Mask and Lithography Conference (EMLC), 2025-06-16, p.137870CPublication Stitching: High NA results
Proceedings paper2026, OPTICAL AND EUV NANOLITHOGRAPHY XXXIX, 2026-02-02, p.139791GPublication The performance evaluation of at-resolution stitching on NXE
Proceedings paper2025, 40th European Mask and Lithography Conference (EMLC), 2025-06-26, p.1378715