Browsing by Author "Garcia Romero, Ivan"

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An improved CMP process for integration of high mobility channel materials

Teugels, Lieve
;
Ong, Patrick
;
Usman Ibrahim, Ansar
;
Delande, Tinne
;
Bhonsle, Rithu
;
Siebert, Max
Proceedings paper
2016, Internation Conference on Planarization/CMP Technology - ICPT, 17/10/2016
An improved CMP process for integration of high mobility channel materials

Teugels, Lieve
;
Ong, Patrick
;
Ansar, Sheik
;
Delande, Tinne
;
Bhonsle, Rithu
;
Siebert, Max
Meeting abstract
2016, International Conference on Planarization Technology - ICPT, 17/10/2016