Browsing by Author "Garfunkel, E. L."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Ultrathin (< 4 nm) SiO2 and Si-O-N gate dielectric layers for silicon microelectronics: understanding the processing, structure, and physical and electrical limits
Journal article2001, Journal of Applied Physics, (90) 5, p.2057-2121