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Browsing by Author "Garofalo, J."

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    Optical proximity correction for 0.3 μm i-line lithography

    Yen, Anthony
    ;
    Tzviatkov, Plamen
    ;
    Wong, Alfred
    ;
    Juffermans, Casper
    ;
    Jonckheere, Rik  
    Journal article
    1996, Microelectronic Engineering, 30, p.141-144

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