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    Feasibility of printing 0.1μm technology with optical lithography

    Maenhoudt, Mireille
    ;
    Verhaegen, Staf
    ;
    Ronse, Kurt  
    ;
    Flagello, D.
    ;
    Geh, B.
    ;
    Kaiser, W.
    Proceedings paper
    1999, Optical Microlithography XII, 14/03/1999, p.347-357

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