Browsing by Author "Geta, Matan"
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Publication Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era
;Alkoken, Ran ;Baram, Mor ;Oron, Gadi ;Schuch, Nivea ;Robert, FredericFigueiro, ThiagoProceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 1295516