Browsing by Author "Ghandehari, Kouros"
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Publication Automated OPC for application in advanced lithography
Proceedings paper1997, Photomask and X-Ray Mask Technology IV, 17/04/1997, p.138-144Publication NA/sigma optimisation strategies for an advanced DUV stepper applied to 0.25 mm and sub-0.25 mm critical levels
Proceedings paper1997, Optical Microlithography X, 12/03/1997, p.320-332