imec Institutional Repository Browsing {{ collection }} by Author "Ghinovker, M."

Publication

Characterization of overlay mark fidelity

Adel, M.

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Ghinovker, M.

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Poplawski, J.M.

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Kassel, E.

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Izikson, P.

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Proceedings paper

2003, Metrology, Inspection, and Process Control for Microlithography XVII, 24/02/2003, p.437-444

Publication

Moiré effect-based Overlay target design for OPO improvements

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Hajaj, E.

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Shaphirov, D.

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Ashwal, E.

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Dror, C.

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Yohanan, R.

Proceedings paper

2021, SPIE Advanced Lithography, 22/02/2021, p.1161125

Publication

Thinking outside the box for improved overlay metrology

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Adel, M.

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Ghinovker, M.

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Poplawski, J.

Journal article

2003, Yield Management Solutions, (5) 2, p.12

Browsing by Author "Ghinovker, M."