Browsing by Author "Giannatou, Eva"
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Publication Deep learning nanometrology of line edge roughness
;Giannatou, Eva ;Constantoudis, Vassilios ;Papavieros, GeorgePapageorgiou, HarrisProceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.1095920