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Browsing by Author "Gilis, Griet"

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    Ultra-thin oxide growth on silicon using ozonated solutions

    De Smedt, Frank
    ;
    Vinckier, Chris
    ;
    Cornelissen, Ingrid  
    ;
    De Gendt, Stefan  
    ;
    Meuris, Marc  
    Proceedings paper
    1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.81-84

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