Browsing by Author "Gilmore, Ian"

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Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument

Franquet, Alexis
;
Spampinato, Valentina
;
Kayser, Sven
;
Havelund, Rasmus
;
Gilmore, Ian
Proceedings paper
2018, SIMS Europe 2018, 16/09/2018
Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures

Franquet, Alexis
;
Spampinato, Valentina
;
Kayser, Sven
;
Havelund, Rasmus
;
Gilmore, Ian
Proceedings paper
2019, FCMN 2019 - International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, 2/04/2019