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Browsing by Author "Gobbin, Korneel"

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    Copper CMP using a Lam teres linear planarization technology

    Vos, I.
    ;
    Meuris, Marc  
    ;
    Sijmus, Bram
    ;
    Stella, Mario
    ;
    Delaney, N.
    ;
    Gobbin, Korneel
    Oral presentation
    2001, 6th International Chemical-Mechanical Polish (C.M.P.) Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) and

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