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Browsing by Author "Gomez, G."

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    Depth profiling of B through silicide on silicon structures, using SIMS and resonant post-ionisation SIMS

    De Bisschop, Peter  
    ;
    Gomez, G.
    ;
    Geenen, Luc
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    1995, 3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors, 20/03/1995, p.22.1

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