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Browsing by Author "Goris, Karen"

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    Distribution of metal contamination in SiO2/Si systems

    Mertens, Paul  
    ;
    Jacobs, Leon
    ;
    Goris, Karen
    ;
    Kenis, Karine  
    ;
    Loewenstein, Lee
    ;
    Teerlinck, Ivo
    Meeting abstract
    1999, Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 17/10/1999, p.1107

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