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Browsing by Author "Gornev, E. S."

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    Area-selective grafting of siloxane molecules on low-k dielectric with respect to copper surface

    Rezvanov, Askar
    ;
    Zyulkov, Ivan  
    ;
    Gornev, E. S.
    ;
    de Marneffe, Jean-Francois  
    ;
    Armini, Silvia  
    Meeting abstract
    2018, Materials for Advanced Metallization Conference - MAM, 18/03/2018, p.02SALD

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