Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Gosain, Rohan"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    The use of eDR-71xx for DSA defect review and automated classification

    Pathangi Sriraman, Hari
    ;
    Van Den Heuvel, Dieter  
    ;
    Bayana, Hareen  
    ;
    Bouckou, Loemba
    ;
    Brown, Jim
    Proceedings paper
    2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 21/02/2015, p.94242F

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings