Browsing by Author "Graeupner, Paul"
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Publication Deep ultraviolet out-of-band contribution in extreme ultraviolet lithography: predictions and experiments
Proceedings paper2011, Extreme Utltraviolet (EUV) Lithography II, 27/02/2011, p.79692OPublication Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.764008Publication Freeform illumination sources: Source mask optimization for 22 nm node SRAM
Proceedings paper2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009