Browsing by Author "Graoui, H."

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Advanced front-end processes for the 45nm CMOS technology node

Collart, E.J.H.
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Felch, S.B.
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Graoui, H.
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Tallavarjula, S.
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Lindsay, Richard
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Pawlak, Bartek
Oral presentation
2004, E-MRS Spring Meeting Symposium B: Materials Science Issues in Advanced CMOS Source-Drain Engineering
Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation

Collart, E.H.
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Felch, S.B.
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Graoui, H.
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Kirkwood, D.
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Pawlak, Bartek
;
Absil, Philippe
Proceedings paper
2005, USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005