Browsing by Author "Gregoire, C."
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Publication Copper-SiLK* semiconductor dielectric interface: XPS surface analysis and RF plasma treatment of the resin
;Lemaire, J. J. ;Rajagopal, A. ;Gregoire, C. ;Pireaux, J. J.Baklanov, MikhaïlMeeting abstract1999, 196th Meeting of the Electrochemical Society: Interconnects and Contact Metallization for ULSI, 17/10/1999, p.738