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Browsing by Author "Gregoire, C."

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    Copper-SiLK* semiconductor dielectric interface: XPS surface analysis and RF plasma treatment of the resin

    Lemaire, J. J.
    ;
    Rajagopal, A.
    ;
    Gregoire, C.
    ;
    Pireaux, J. J.
    ;
    Baklanov, Mikhaïl
    Meeting abstract
    1999, 196th Meeting of the Electrochemical Society: Interconnects and Contact Metallization for ULSI, 17/10/1999, p.738

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