Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Greiner, K."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

    Guissi, Sofiane  
    ;
    Clark, William
    ;
    Juncker, Aurélie
    ;
    Ervin, J.
    ;
    Greiner, K.
    ;
    Fried, D.
    Proceedings paper
    2017, IEEE International Interconnect Technology Conference - IITC, 16/05/2017, p.1-3

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings