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Browsing by Author "Grozev, G."

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    100nm generation contact patterning by low temperature 193nm resist reflow process

    Van Driessche, V.
    ;
    Grozev, G.
    ;
    Lucas, K.
    ;
    Van Roey, Frieda  
    ;
    Tzviatkov, Plamen
    Journal article
    2002, Semiconductor Fabtech, 16, p.?-?

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