Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Gschwandtner, A."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Single wafer CVD of silicon nitride for CMOS gate applications

    Pomarede, C.
    ;
    Werkhoven, Chris
    ;
    Weidmann, J.
    ;
    Bergman, T.
    ;
    Gschwandtner, A.
    ;
    Houssa, Michel  
    Proceedings paper
    1999, Ultrathin SiO2 High-K Materials for ULSI Gate Dielectrics, 5/04/1999, p.147-154

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings