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Browsing by Author "Gstrein, Florian"

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    Publication

    Dry development rinse process for ultimate resolution Improvement via pattern collapse mitigation

    Sayan, Safak
    ;
    Tao, Zheng  
    ;
    Chan, BT  
    ;
    De Simone, Danilo  
    ;
    Kuwahara, Yuhei
    ;
    Nafus, Kathleen  
    Proceedings paper
    2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.942516

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