Browsing by Author "Gui, C.Q."
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Publication Stepper lithography on large-topography microstructures for thermoelectric energy scavengers
;Su, Jiale ;Vullers, Ruud ;Goedbloed, Martijn ;van Andel, Yvonne ;Pellens, RudyGui, C.Q.Proceedings paper2007, PowerMEMS. The 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, 28/11/2007, p.153-156