Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Guittet, P.Y."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Metrology and inspection for process control during bonding and thinning of stacked wafers for manufacturing 3D SIC's

    Halder, Sandip  
    ;
    Jourdain, Anne  
    ;
    Claes, Martine  
    ;
    De Wolf, Ingrid  
    ;
    Travaly, Youssef
    ;
    Beyne, Eric  
    Proceedings paper
    2011, IEEE 61st Electronic Components and Technology Conference - ECTC, 1/06/2011, p.999-1002

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings