Browsing by Author "Guschin, O."
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Publication Nanostructured silicon surface morphology formation under highly ionized microwave plasma conditions
;Baklanov, Mikhaïl ;Guschin, O. ;Ignatov, P. ;Yafarov, R.Yanovich, S.Oral presentation2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM