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Browsing by Author "Guschin, O."

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    Nanostructured silicon surface morphology formation under highly ionized microwave plasma conditions

    Baklanov, Mikhaïl
    ;
    Guschin, O.
    ;
    Ignatov, P.
    ;
    Yafarov, R.
    ;
    Yanovich, S.
    Oral presentation
    2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM

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