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Browsing by Author "Hüe, F."

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    Strain mapping in MOSFETs by transmission electron microscopy

    Hüe, F.
    ;
    Hytch, Martin
    ;
    Lou, Nelson
    ;
    Bender, Hugo  
    ;
    Claverie, Alain
    Proceedings paper
    2008, 9th International Conference on Ultimate Integration of Silicon - ULIS, 12/03/2008, p.85-87

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