Browsing by Author "Hall, L."
Now showing 1 - 4 of 4
- Results Per Page
- Sort Options
Publication Chemistry of the silicon oxide surface: adsorption from SC1 solutions
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Chemistry of the silicon oxide surface: adsorption from SC1 solutions
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.53-58Publication How clean is clean enough?
Proceedings paper1995, Proceedings of SEMICON/West 1995 Technical Seminar: Cleaning Technology for the Submicron Era, 11/07/1995, p.7Publication Silicon orientation effects in the atomic layer deposition of hafnium oxide
Journal article2008, Journal of the Electrochemical Society, (155) 2, p.G9-G12