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Browsing by Author "Hansen, Otto"

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    Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions

    Rosseel, Erik  
    ;
    Vandervorst, Wilfried  
    ;
    Clarysse, Trudo
    ;
    Goossens, Jozefien
    ;
    Moussa, Alain  
    Proceedings paper
    2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.135-140

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