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Browsing by Author "Hardy, Denis E."

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    Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations

    Bennett, Marylyn Hoy
    ;
    Grenville, Andrew
    ;
    Hector, Scott
    ;
    Palmer, Shane
    ;
    Leunissen, Peter
    Proceedings paper
    2005, Optical Microlithography XVIII, 27/02/2005, p.599-610

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