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Browsing by Author "Hattori, Atsushi"

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    Publication

    High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography

    D'Urzo, Lucia
    ;
    Umeda, Toru
    ;
    Mizuno, Takehito
    ;
    Hattori, Atsushi
    ;
    Singh, Amarnauth
    ;
    Beera, Rajan
    Proceedings paper
    2021, Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference, FEB 22-26, 2021, p.116120H

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