Browsing by Author "Hattori, T."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Evolution of silicon cleaning technology over the last twenty years
Proceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.3-7Publication Wafer preparation: ultra-clean processing and Si- material defects
; Hattori, T.Proceedings paper1998, Semiconductor Silicon 1998. Proceedings of the 8th International Symposium on Silicon Materials Science and Technology, 4/05/1998, p.589-591