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Browsing by Author "Hattrick-Simpers, J.R."

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    Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film

    Chang, K.S.
    ;
    Green, M.L.
    ;
    Levin, I.
    ;
    Hattrick-Simpers, J.R.
    ;
    Jaye, C.
    ;
    Fischer, D.A.
    ;
    Takeuchi, I.
    Journal article
    2010, Applied Physics Letters, (96) 19, p.192114

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