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Browsing by Author "Hauf, H."

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    A low thermal budget pre metal dielectric stack using PECVD and HDP processing

    Schaekers, Marc  
    ;
    De Jaeger, Brice  
    ;
    Sleeckx, Erik  
    ;
    Debusschere, Ingrid  
    ;
    Van Hove, Marleen
    Oral presentation
    2001, 7th International Dielectrics & Conductors for ULSI Multilevel Interconnection Conference (DCMIC) and Exhibition

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