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Browsing by Author "Haukka, Suvi"

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    Opportunities and challenges for integration of ALD barrier layers in damascene process flows

    Sprey, Hessel  
    ;
    Schuhmacher, Jorg
    ;
    Travaly, Youssef
    ;
    Sutcliffe, Victor
    ;
    Abell, Thomas
    Proceedings paper
    2004, Atomic Layer Deposition Conference, 16/08/2004

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