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Browsing by Author "Hautala, J."

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    Evaluation of gas cluster ion beam processing for sealing af a porous dielectric

    Brongersma, Sywert  
    ;
    Sherman, S.
    ;
    Tabat, M.
    ;
    Patz, Michael
    ;
    Beyer, Gerald  
    ;
    Travaly, Youssef
    Proceedings paper
    2005-01, Advanced Metallization Conference 2004, 19/10/2004, p.463-468

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